@inproceedings{TUW-219757, author = {Singulani, Anderson P. and Ceric, Hajdin and Selberherr, Siegfried}, title = {{S}tress {E}stimation in {O}pen {T}ungsten {T}{S}{V}}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2013}, pages = {65--68}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Singulani_1.pdf}, isbn = {978-1-4673-5733-3}, doi = {10.1109/SISPAD.2013.6650575}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {G}lasgow, {S}cotland, {U}nited {K}ingdom; 2013-09-03 -- 2013-09-05} }