@article{TUW-221123, author = {Singulani, Anderson P. and Ceric, Hajdin and Selberherr, Siegfried}, title = {{S}tress {E}volution in the {M}etal {L}ayers of {T}{S}{V}s with {B}osch {S}callops}, journal = {{M}icroelectronics {R}eliability}, year = {2013}, volume = {53}, pages = {1602--1605}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/JB2013_Singulani_1.pdf}, doi = {10.1016/j.microrel.2013.07.132} }