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@article{TUW-221123,
    author = {Singulani, Anderson P. and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{S}tress {E}volution in the {M}etal {L}ayers of {T}{S}{V}s with {B}osch {S}callops},
    journal = {{M}icroelectronics {R}eliability},
    year = {2013},
    volume = {53},
    pages = {1602--1605},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/JB2013_Singulani_1.pdf},
    doi = {10.1016/j.microrel.2013.07.132}
}