@inproceedings{TUW-222504, author = {Singulani, Anderson P. and Ceric, Hajdin and Langer, Erasmus and Carniello, Sara}, title = {{E}ffects of {B}osch scallops on metal layer stress of an open {T}hrough {S}ilicon {V}ia technology}, booktitle = {{P}roceedings of the {I}nternational {R}eliability {P}hysics {S}ymposium ({I}{R}{P}{S})}, year = {2013}, pages = {CP.2.1--CP.2.5}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Singulani_3.pdf}, isbn = {978-1-4799-0112-8}, doi = {10.1109/IRPS.2013.6532066}, note = {poster presentation: {I}nternational {R}eliability {P}hysics {S}ymposium ({I}{R}{P}{S}), {M}onterey, {C}{A}, {U}{S}{A}; 2013-04-14 -- 2013-04-18} }