@unpublished{TUW-222513, author = {Singulani, Anderson P. and Ceric, Hajdin and Selberherr, Siegfried}, title = {{S}tress {E}volution in the {M}etal {L}ayers of {T}{S}{V}s with {B}osch {S}callops}, year = {2013}, note = {poster presentation: {E}uropean {S}ymposium on {R}eliability of {E}lectron {D}evices, {F}ailure {P}hysics and {A}nalysis ({E}{S}{R}{E}{F}), {A}rcachon, {F}rance; 2013-09-30 -- 2013-10-04} }