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@article{TUW-225517,
    author = {Filipovic, Lado and Selberherr, Siegfried and Mutinati, G. C. and Brunet, Elise and Seinhauer, Stephan and K{\"o}ck, Anton and Teva, Jordi and Kraft, J. and Siegert, Joerg and Schrank, F.},
    title = {{M}ethods of {S}imulating {T}hin {F}ilm {D}eposition {U}sing {S}pray {P}yrolysis {T}echniques},
    journal = {{M}icroelectronic {E}ngineering},
    year = {2014},
    volume = {117},
    pages = {57--66},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/JB2014_Filipovic_1.pdf},
    doi = {10.1016/j.mee.2013.12.025}
}