@article{TUW-225517, author = {Filipovic, Lado and Selberherr, Siegfried and Mutinati, G. C. and Brunet, Elise and Seinhauer, Stephan and K{\"o}ck, Anton and Teva, Jordi and Kraft, J. and Siegert, Joerg and Schrank, F.}, title = {{M}ethods of {S}imulating {T}hin {F}ilm {D}eposition {U}sing {S}pray {P}yrolysis {T}echniques}, journal = {{M}icroelectronic {E}ngineering}, year = {2014}, volume = {117}, pages = {57--66}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/JB2014_Filipovic_1.pdf}, doi = {10.1016/j.mee.2013.12.025} }