@article{TUW-228521, author = {Filipovic, Lado and Selberherr, Siegfried and Mutinati, G. C. and Brunet, E. and Steinhauer, S. and K{\"o}ck, Anton and Teva, Jordi and Kraft, J. and Siegert, Joerg and Schrank, F. and Gspan, Christian and Grogger, Werner}, title = {{M}odeling the {G}rowth of {T}in {D}ioxide using {S}pray {P}yrolysis {D}eposition for {G}as {S}ensor {A}pplications}, journal = {{I}{E}{E}{E} {T}ransactions on {S}emiconductor {M}anufacturing}, year = {2014}, volume = {27}, number = {2}, pages = {269--277}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/JB2014_Filipovic_2.pdf}, doi = {10.1109/TSM.2014.2298883} }