@inproceedings{TUW-228656, author = {Filipovic, Lado and Orio, Roberto and Selberherr, Siegfried}, title = {{P}rocess and {P}erformance of {C}opper {T}{S}{V}s}, booktitle = {{C}onference {P}roceedings of the {T}enth {W}orkshop of the {T}hematic {N}etwork on {S}ilicon on {I}nsulator {T}echnology, {D}evices and {C}ircuits}, year = {2014}, pages = {1--2}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Filipovic_3.pdf}, note = {talk: {W}orkshop of the {T}hematic {N}etwork on {S}ilicon {O}n {I}nsulator {T}echnology, {D}evices and {C}ircuits ({E}{U}{R}{O}{S}{O}{I}), {T}arragona, {S}pain; 2014-01-27 -- 2014-01-29} }