@inproceedings{TUW-228686, author = {Baer, Eberhard and Evanschitzky, P. and Lorenz, J. and Roger, Frederic and Minixhofer, R. and Filipovic, Lado and Orio, Roberto and Selberherr, Siegfried}, title = {{C}oupled {S}imulation to {D}etermine {A}cross {W}afer {V}ariations for {E}lectrical and {R}eliability {P}arameters of {T}hrough-{S}ilicon {V}{I}{A}s}, booktitle = {{B}ook of {A}bstracts}, year = {2014}, numpages = {2}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2014_Filipovic_4.pdf}, note = {talk: {E}uropean {W}orkshop on {M}aterials for {A}dvanced {M}etallization ({M}{A}{M}), {C}hemnitz, {G}ermany; 2014-03-02 -- 2014-03-05} }