@inproceedings{TUW-228688, author = {Filipovic, Lado and Orio, Roberto and Selberherr, Siegfried}, title = {{P}rocess and {R}eliability of {S}{F}6/{O}2 {P}lasma {E}tched {C}opper {T}{S}{V}s}, booktitle = {{P}roceedings of the {I}{E}{E}{E} 15th {I}nternational {C}onference on {T}hermal, {M}echanical and {M}ulti-{P}hysics {S}imulation and {E}xperiments in {M}icroelectronics and {M}icrosystems ({E}uro{S}im{E})}, year = {2014}, numpages = {4}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2014_Filipovic_5.pdf}, isbn = {978-1-4799-4791-1}, doi = {10.1109/EuroSimE.2014.6813768}, note = {talk: {I}nternational {C}onference on {T}hermal, {M}echanical and {M}ulti-{P}hysics {S}imulation and {E}xperiments in {M}icroelectronics and {M}icrosystems ({E}uro{S}im{E}), {G}hent, {B}elgium; 2014-04-07 -- 2014-04-09} }