@inproceedings{TUW-231523, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{T}he {E}ffects of {E}tching and {D}eposition on the {P}erformance and {S}tress {E}volution of {O}pen {T}hrough {S}ilicon {V}ias}, booktitle = {{A}bstracts 25th {E}uropean {S}ymposium on {R}eliability of {E}lectron {D}evices, {F}ailure {P}hysics and {A}nalysis ({E}{S}{R}{E}{F})}, year = {2014}, pages = {36}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2014_Filipovic_2.pdf}, note = {talk: {E}uropean {S}ymposium on {R}eliability of {E}lectron {D}evices, {F}ailure {P}hysics and {A}nalysis ({E}{S}{R}{E}{F}), {B}erlin, {G}ermany; 2014-09-29 -- 2014-10-02} }