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@inproceedings{TUW-231526,
    author = {Filipovic, Lado and Selberherr, Siegfried},
    title = {{S}pray {P}yrolysis {D}eposition for {G}as {S}ensor {I}ntegration in the {B}ackend of {S}tandard {C}{M}{O}{S} {P}rocesses},
    booktitle = {{P}roc.{I}ntl.{C}onf.on {S}olid-{S}tate and {I}ntegrated {C}ircuit {T}echnology ({I}{C}{S}{I}{C}{T})},
    year = {2014},
    pages = {1692--1695},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2014_Filipovic_3.pdf},
    isbn = {978-1-4799-3282-5},
    doi = {10.1109/ICSICT.2014.7021507},
    note = {invited; talk: {I}nternational {C}onference on {S}olid {S}tate and {I}ntegrated {C}ircuit {T}echnology ({I}{C}{S}{I}{C}{T}), {G}uilin, {C}hina; 2014-10-28 -- 2014-10-31}
}