@inproceedings{TUW-231526, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{S}pray {P}yrolysis {D}eposition for {G}as {S}ensor {I}ntegration in the {B}ackend of {S}tandard {C}{M}{O}{S} {P}rocesses}, booktitle = {{P}roc.{I}ntl.{C}onf.on {S}olid-{S}tate and {I}ntegrated {C}ircuit {T}echnology ({I}{C}{S}{I}{C}{T})}, year = {2014}, pages = {1692--1695}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2014_Filipovic_3.pdf}, isbn = {978-1-4799-3282-5}, doi = {10.1109/ICSICT.2014.7021507}, note = {invited; talk: {I}nternational {C}onference on {S}olid {S}tate and {I}ntegrated {C}ircuit {T}echnology ({I}{C}{S}{I}{C}{T}), {G}uilin, {C}hina; 2014-10-28 -- 2014-10-31} }