@inproceedings{TUW-233364, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{A}bout {P}rocesses and {P}erformance of {I}ntegrated {G}as {S}ensor {C}omponents}, booktitle = {{A}bstracts of the {E}nergy-{M}aterials-{N}anotechnology {F}all {M}eeting ({E}{M}{N})}, year = {2014}, pages = {96--97}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2014_Filipovic_4.pdf}, note = {invited; talk: {E}nergy-{M}aterials-{N}anotechnology {F}all {M}eeting ({E}{M}{N}), {O}rlando, {U}{S}{A}; 2014-11-22 -- 2014-11-25} }