@article{TUW-236667, author = {Lindsey, Sloan and Waid, Simon and Hobler, Gerhard and Wanzenb{\"o}ck, Heinz D. and Bertagnolli, Emmerich}, title = {{I}nverse modeling of {F}{I}{B} milling by dose profile optimization}, journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}}, year = {2014}, volume = {341}, pages = {77--83}, doi = {10.1016/j.nimb.2014.09.006} }