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@article{TUW-238083,
    author = {Filipovic, Lado and Selberherr, Siegfried},
    title = {{P}erformance and {S}tress {A}nalysis of {M}etal {O}xide {F}ilms for {C}{M}{O}{S}-{I}ntegrated {G}as {S}ensors},
    journal = {{S}ensors},
    year = {2015},
    volume = {15},
    number = {4},
    pages = {7206--7227},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/JB2015_Filipovic_1.pdf},
    doi = {10.3390/s150407206}
}