@article{TUW-238083, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{P}erformance and {S}tress {A}nalysis of {M}etal {O}xide {F}ilms for {C}{M}{O}{S}-{I}ntegrated {G}as {S}ensors}, journal = {{S}ensors}, year = {2015}, volume = {15}, number = {4}, pages = {7206--7227}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/JB2015_Filipovic_1.pdf}, doi = {10.3390/s150407206} }