@article{TUW-238355, author = {Baer, Eberhard and Evanschitzky, P. and Lorenz, J. and Roger, Frederic and Minixhofer, R. and Filipovic, Lado and Orio, Roberto and Selberherr, Siegfried}, title = {{C}oupled {S}imulation to {D}etermine the {I}mpact of {A}cross {W}afer {V}ariations in {O}xide {P}{E}{C}{V}{D} on {E}lectrical and {R}eliability {P}arameters of {T}hrough-{S}ilicon {V}ias}, journal = {{M}icroelectronic {E}ngineering}, year = {2015}, volume = {137}, pages = {141--145}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/JB2015_Selberherr_1.pdf}, doi = {10.1016/j.mee.2014.11.014} }