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@inproceedings{TUW-238974,
    author = {Filipovic, Lado and Selberherr, Siegfried},
    title = {{S}tress {C}onsiderations in {T}hin {F}ilms for {C}{M}{O}{S}-{I}ntegrated {G}as {S}ensors},
    booktitle = {{P}roceedings of the 227th {E}{C}{S} {M}eeting ({E}{C}{S})},
    year = {2015},
    publisher = {{E}{C}{S} {T}ransactions},
    address = {67},
    numpages = {2},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2015_Filipovic_7.pdf},
    issn = {1938-6737},
    note = {talk: {M}eeting of the {E}lectrochemical {S}ociety ({E}{C}{S}), {C}hicago, {I}llinois, {U}{S}{A}; 2015-05-24 -- 2015-05-28}
}