@incollection{TUW-238981, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{S}tress {C}onsiderations in {T}hin {F}ilms for {C}{M}{O}{S}-{I}ntegrated {G}as {S}ensors}, booktitle = {{A}dvanced {C}{M}{O}{S}-{C}ompatible {S}emiconductor {D}evices 17, {V}ol.66, {N}o.5}, year = {2015}, editor = {Omura, Y. and Martino, J. A. and Raskin, J.-P. and Selberherr, Siegfried and Ishii, H. and Gamiz, Francisco and Nguyen, B.-Y.}, pages = {243--250}, organization = {{T}he {E}lectrochemical {S}ociety}, publisher = {{E}{C}{S} {T}ransactions}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/BC2015_Filipovic_1.pdf}, isbn = {978-1-62332-238-0}, doi = {10.1149/06605.0243ecst} }