@inproceedings{TUW-239228, author = {Kirchauer, Heinrich and Selberherr, Siegfried}, title = {{A} {T}hree-{D}imensional {P}hotolithography {S}imulator {I}ncluding {R}igorous {N}onplanar {E}xposure {S}imulation for {O}ff-{A}xis {I}llumination}, booktitle = {{P}roceedings of {S}{P}{I}{E} {O}ptical {M}icrolithography}, year = {1998}, pages = {3334·86}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Kirchauer_2.pdf}, note = {poster presentation: {S}{P}{I}{E} {O}ptical {M}icrolithography, {S}anta {C}lara, {C}{A}, {U}{S}{A}; 1998-02-22 -- 1998-02-27} }