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@inproceedings{TUW-240760,
    author = {Papaleo, Santo and Zisser, Wolfhard and Ceric, Hajdin},
    title = {{F}actors that {I}nfluence {D}elamination at the {B}ottom of {O}pen {T}{S}{V}s},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2015},
    pages = {421--424},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2015/CP2015_Papaleo_1.pdf},
    isbn = {978-1-4673-7858-1},
    doi = {10.1109/SISPAD.2015.7292350},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {W}ashington {D}{C}, {U}{S}{A}; 2015-09-09 -- 2015-09-11}
}