@article{TUW-241177, author = {Filipovic, Lado and Singulani, Anderson P. and Roger, Frederic and Carniello, Sara and Selberherr, Siegfried}, title = {{I}ntrinsic {S}tress {A}nalysis of {T}ungsten-{L}ined {O}pen {T}{S}{V}s}, journal = {{M}icroelectronics {R}eliability}, year = {2015}, volume = {55}, number = {9-10}, pages = {1843--1848}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2015/JB2015_filipovic_1.pdf}, doi = {10.1016/j.microrel.2015.06.014} }