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@article{TUW-242063,
    author = {Hobler, Gerhard},
    title = {{C}ombined binary collision and continuum mechanics model applied to focused ion beam milling of a silicon membrane},
    journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}},
    year = {2015},
    volume = {352},
    pages = {22--26}
}