@article{TUW-242063, author = {Hobler, Gerhard}, title = {{C}ombined binary collision and continuum mechanics model applied to focused ion beam milling of a silicon membrane}, journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}}, year = {2015}, volume = {352}, pages = {22--26} }