@inproceedings{TUW-243711, author = {Illarionov, Yury and Vexler, M.I. and Fedorov, V. V. and Suturin, S. M. and Sokolov, N. S. and Grasser, Tibor}, title = {{C}haracterization of {E}pitaxial {C}alcium {F}luoride as a {D}ielectric {M}aterial for {U}ltra-{T}hin {B}arrier {L}ayers in {S}ilicon {M}icroelectronics}, booktitle = {{E}xtended {A}bstracts of the 2015 {I}nternational {C}onference on {S}olid {S}tate {D}evices and {M}aterials ({S}{S}{D}{M} 2015)}, year = {2015}, pages = {330--331}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2015/CP2015_Illarionov_3.pdf}, isbn = {978-4-86348-514-3}, note = {poster presentation: {I}nternational {C}onference on {S}olid {S}tate {D}evices and {M}aterials ({S}{S}{D}{M}), {S}apporo, {J}apan; 2015-09-27 -- 2015-09-30} }