@inproceedings{TUW-248709, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{M}odeling the {D}eposition and {S}tress {G}eneration in {T}hin {F}ilms for {C}{M}{O}{S}-{I}ntegrated {G}as {S}ensors}, booktitle = {{P}roceedings of the {B}{I}{T}'s 2nd {A}nnual {W}orld {C}ongress of {S}mart {M}aterials 2016}, year = {2016}, pages = {517}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/CP2016_Filipovic_1.pdf}, note = {invited; talk: {W}orld {C}ongress of {S}mart {M}aterials ({W}{C}{S}{M}), {S}ingapore; 2016-03-04 -- 2016-03-06} }