@inproceedings{TUW-249786, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{E}ffects of the {D}eposition {P}rocess {V}ariation on the {P}erformance of {O}pen {T}{S}{V}s}, booktitle = {{P}roceedings of {I}{E}{E}{E} {E}lectronic {C}omponents and {T}echnology {C}onference ({E}{C}{T}{C})}, year = {2016}, pages = {2188--2195}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/CP2016_Filipovic2.pdf}, isbn = {978-1-5090-1204-6}, doi = {10.1109/ECTC.2016.177}, note = {poster presentation: {I}{E}{E}{E} {E}lectronic {C}omponents and {T}echnology {C}onference ({E}{C}{T}{C}), {L}as {V}egas, {N}{V}, {U}{S}{A}; 2016-05-31 -- 2016-06-03} }