@article{TUW-251680, author = {Simonka, Vito and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried}, title = {{G}rowth {R}ates of {D}ry {T}hermal {O}xidation of 4{H}-{S}ilicon {C}arbide}, journal = {{J}ournal of {A}pplied {P}hysics}, year = {2016}, volume = {120}, number = {13}, pages = {135705-1--135705-8}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/JB2016_simonka_1.pdf}, doi = {10.1063/1.4964688} }