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@article{TUW-251680,
    author = {Simonka, Vito and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried},
    title = {{G}rowth {R}ates of {D}ry {T}hermal {O}xidation of 4{H}-{S}ilicon {C}arbide},
    journal = {{J}ournal of {A}pplied {P}hysics},
    year = {2016},
    volume = {120},
    number = {13},
    pages = {135705-1--135705-8},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/JB2016_simonka_1.pdf},
    doi = {10.1063/1.4964688}
}