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@article{TUW-251812,
    author = {Hobler, Gerhard and Nietiadi, Maureen and Bradley, R. Mark and Urbassek, Herbert M.},
    title = {{S}puttering of silicon membranes with nanoscale thickness},
    journal = {{J}ournal of {A}pplied {P}hysics},
    year = {2016},
    volume = {119},
    pages = {245105}
}