@article{TUW-251812, author = {Hobler, Gerhard and Nietiadi, Maureen and Bradley, R. Mark and Urbassek, Herbert M.}, title = {{S}puttering of silicon membranes with nanoscale thickness}, journal = {{J}ournal of {A}pplied {P}hysics}, year = {2016}, volume = {119}, pages = {245105} }