@article{TUW-253596, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{S}tress {C}onsiderations for {S}ystem-on-{C}hip {G}as {S}ensor {I}ntegration in {C}{M}{O}{S} {T}echnology}, journal = {{I}{E}{E}{E} {T}ransactions on {D}evice and {M}aterials {R}eliability}, year = {2016}, volume = {16}, number = {4}, pages = {483--495}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/JB2016_Filipovic_2.pdf}, doi = {10.1109/TDMR.2016.2625461} }