@article{TUW-255011, author = {Simonka, Vito and Nawratil, Georg and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried}, title = {{A}nisotropic {I}nterpolation {M}ethod of {S}ilicon {C}arbide {O}xidation {G}rowth {R}ates for {T}hree-{D}imensional {S}imulation}, journal = {{S}olid-{S}tate {E}lectronics}, year = {2017}, volume = {128}, number = {2}, pages = {135--140}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/JB2016_simonka_2.pdf}, doi = {10.1016/j.sse.2016.10.032}, note = {invited} }