@unpublished{TUW-255290, author = {Hobler, Gerhard and Nietiadi, Maureen and Bradley, R. Mark and Urbassek, Herbert M.}, title = {{S}puttering of silicon membranes with nanoscale thickness}, year = {2016}, note = {talk: {I}nternational {C}onference on {S}imulation of {R}adiation {E}ffects in {S}olids, {L}oughborough, {G}{B}; 2016-06-19 -- 2016-06-24} }