@article{TUW-255322, author = {Gillinger, Manuel and Shaposhnikov, Kirill and Knobloch, Theresia and Schneider, Michael and Kaltenbacher, Manfred and Schmid, Ulrich}, title = {{I}mpact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based {S}{A}{W} devices on sapphire}, journal = {{A}pplied {P}hysics {L}etters}, year = {2016}, volume = {108}, pages = {231601-1--231601-4}, doi = {10.1063/1.4953259} }