@unpublished{TUW-258314, author = {Simonka, Vito}, title = {{N}atancni {F}izikalni {M}odeli 3{D} {S}imulatorjev {P}roizvodnje {M}ikroelektronskih {N}aprav}, year = {2017}, note = {invited; talk: {F}aculty of {N}atural {S}ciences and {M}athematics, {U}niversity of {M}aribor, {S}lovenia; 2017-01-26} }