@article{TUW-258916, author = {Brinciotti, Enrico and Badino, Giorgio and Knaipp, Martin and Gramse, G and Smoliner, J{\"u}rgen and Kienberger, Ferry}, title = {{C}alibrated {N}anoscale {D}opant {P}rofiling and {C}apacitance of a {H}igh-{V}oltage {L}ateral {M}{O}{S} {T}ransistor at 20 {G}{H}z {U}sing {S}canning {M}icrowave {M}icroscopy}, journal = {{I}{E}{E}{E} {T}ransactions on {N}anotechnology}, year = {2017}, volume = {16}, number = {2}, pages = {245--252}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/JB2017_Brinciotti_01.pdf}, doi = {10.1109/TNANO.2017.2657888} }