@article{TUW-260032, author = {Selberherr, Siegfried}, title = {{P}rocess and {D}evice {M}odeling for {V}{L}{S}{I}}, journal = {{M}icroelectronics {J}ournal}, year = {1985}, volume = {16}, number = {6}, pages = {56--57}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1985/JB1985_Selberherr_1.pdf}, doi = {10.1016/S0026-2692(85)80172-5} }