@article{TUW-260033, author = {Selberherr, Siegfried and Langer, Erasmus}, title = {{T}hree {D}imensional {P}rocess and {D}evice {M}odeling}, journal = {{M}icroelectronics {R}eliability}, year = {1990}, volume = {30}, number = {3}, pages = {624}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1990/JB1990_Selberherr_3.pdf}, doi = {10.1016/0026-2714(90)90512-L} }