@inproceedings{TUW-261147, author = {Simonka, Vito and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried}, title = {{M}odeling of {E}lectrical {A}ctivation {R}atios of {P}hosphorus and {N}itrogen {D}oped {S}ilicon {C}arbide}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2017}, pages = {125--128}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2017/CP2017_Simonka_02.pdf}, isbn = {978-4-86348-612-6}, doi = {10.23919/SISPAD.2017.8085280}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}amakura, {J}apan; 2017-09-07 -- 2017-09-09} }