@inproceedings{TUW-265822, author = {Gillinger, Manuel and Knobloch, Theresia and Schneider, Michael and Schmid, Ulrich}, title = {{H}arsh {E}nvironmental {S}urface {A}coustic {W}ave {T}emperature {S}ensor {B}ased on {P}ure and {S}candium doped {A}luminum {N}itride on {S}apphire}, booktitle = {{P}roceedings of {E}urosensors 2017, {P}aris}, year = {2017}, pages = {1--4}, publisher = {{M}{D}{P}{I}}, address = {{V}ol. 1/ {I}ss. 4}, issn = {2504-3900}, doi = {10.3390/proceedings1040341}, note = {talk: {E}urosensors 2017, {P}aris, {F}rankreich; 2017-09-03 -- 2017-09-06} }