@article{TUW-268173, author = {Simonka, Vito and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried}, title = {{E}mpirical {M}odel for {E}lectrical {A}ctivation of {A}luminum- and {B}oron-{I}mplanted {S}ilicon {C}arbide}, journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices}, year = {2018}, volume = {65}, number = {2}, pages = {674--679}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/JB2018_Simonka_1.pdf}, doi = {10.1109/TED.2017.2786086} }