@incollection{TUW-270020, author = {Lorenz, J. and Asenov, A and Baer, Eberhard and Barraud, Sylvain and Millar, C. and Nedjalkov, Mihail}, title = {{P}rocess {V}ariability for {D}evices at and {B}eyond the 7nm {N}ode}, booktitle = {{A}dvanced {C}{M}{O}{S}-{C}ompatible {S}emiconductor {D}evices 18, {V}ol. 85, {N}o. 8}, year = {2018}, editor = {Martino, J. A. and Raskin, J.-P. and Selberherr, Siegfried and Ishii, H. and Gamiz, Francisco and Nguyen, B.-Y. and Yoshino, A.}, pages = {113--124}, organization = {{T}he {E}lectrochemical {S}ociety}, publisher = {{E}{C}{S} {T}ransactions}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/BC2018_Nedjalkov_1.pdf}, isbn = {978-1-62332-488-9}, doi = {10.1149/08508.0151ecst}, note = {invited} }