@article{TUW-270340, author = {Simonka, Vito and Toifl, Alexander and H{\"o}ssinger, Andreas and Selberherr, Siegfried and Weinbub, Josef}, title = {{T}ransient {M}odel for {E}lectrical {A}ctivation of {A}luminium and {P}hosphorus-{I}mplanted {S}ilicon {C}arbide}, journal = {{J}ournal of {A}pplied {P}hysics}, year = {2018}, volume = {123}, number = {23}, pages = {235701-1--235701-7}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/JB2018_Simonka_3.pdf}, doi = {10.1063/1.5031185} }