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@inproceedings{TUW-270624,
    author = {Simonka, Vito and H{\"o}ssinger, Andreas and Selberherr, Siegfried and Weinbub, Josef},
    title = {{I}nvestigation of {P}ost-{I}mplantation {A}nnealing for {P}hosphorus-{I}mplanted 4{H}-{S}ilicon {C}arbide},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {M}icroelectronic {D}evices and {T}echnologies ({M}ic{D}{A}{T})},
    year = {2018},
    pages = {42--44},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/CP2018_Simonka_1.pdf},
    note = {talk: {I}nternational {C}onference on {M}icroelectronic {D}evices and {T}echnologies ({M}ic{D}{A}{T}), {B}arcelona, {S}pain; 2018-06-20 -- 2018-06-22}
}