@inproceedings{TUW-272006, author = {Toifl, Alexander and Simonka, Vito and H{\"o}ssinger, Andreas and Selberherr, Siegfried and Weinbub, Josef}, title = {{S}teady-{S}tate {E}mpirical {M}odel for {E}lectrical {A}ctivation of {S}ilicon-{I}mplanted {G}allium {N}itride}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2018}, pages = {336--339}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/CP2018_Toifl_1.pdf}, isbn = {978-1-5386-6788-0}, doi = {10.1109/SISPAD.2018.8551728}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {A}ustin, {T}exas, {U}{S}{A}; 2018-09-24 -- 2018-09-26} }