@mastersthesis{TUW-272756, author = {Toifl, Alexander}, title = {{M}odeling and {S}imulation of {T}hermal {A}nnealing of {I}mplanted {G}a{N} and {S}i{C}}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {2018} }