@article{TUW-273607, author = {Gillinger, Manuel and Shaposhnikov, Kirill and Knobloch, Theresia and St{\"o}ger-Pollach, Michael and Artner, Werner and Hradil, Klaudia and Schneider, Michael and Kaltenbacher, Manfred and Schmid, Ulrich}, title = {{E}nhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for {S}{A}{W} applications}, journal = {{A}pplied {S}urface {S}cience}, year = {2018}, volume = {435}, pages = {432--437}, doi = {10.1016/j.apsusc.2017.11.113} }