@phdthesis{TUW-273755, author = {Simonka, Vito}, title = {{T}hermal {O}xidation and {D}opant {A}ctivation of {S}ilicon {C}arbide}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {2018}, url = {http://www.iue.tuwien.ac.at/phd/simonka/}, doi = {10.34726/hss.2018.60302} }