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@inproceedings{TUW-274937,
    author = {Current, M. and Hobler, Gerhard and Kawasaki, Y. and Sugitani, M.},
    title = {{C}hanneled {M}e{V} {B}, {P} and {A}s {P}rofiles in {S}i(100): {M}onte-{C}arlo {M}odels and {S}{I}{M}{S}},
    booktitle = {22nd {I}nternational {C}onference on {I}on {I}mplantation {T}echnology},
    year = {2018},
    pages = {251--254},
    url = {https://publik.tuwien.ac.at/files/publik_274937.pdf},
    note = {talk: {I}nternational {C}onference on {I}on {I}mplantation {T}echnology, {W}{\"u}rzburg; 2018-09-16 -- 2018-09-21}
}