@inproceedings{TUW-280115, author = {Aguinsky, Luiz Felipe and Manstetten, Paul and H{\"o}ssinger, Andreas and Selberherr, Siegfried and Weinbub, Josef}, title = {{T}hree-{D}imensional {T}{C}{A}{D} for {A}tomic {L}ayer {P}rocessing}, booktitle = {{B}ook of {A}bstracts of the {W}orkshop on {H}igh {P}erformance {T}{C}{A}{D} ({W}{H}{P}{T}{C}{A}{D})}, year = {2019}, pages = {5}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2019/CP2019_Aguinsky_1.pdf}, note = {talk: {W}orkshop on {H}igh {P}erformance {T}{C}{A}{D} ({W}{H}{P}{T}{C}{A}{D}), {C}hicago, {I}{L}, {U}{S}{A}; 2019-05-24 -- 2019-05-25} }