@inproceedings{TUW-280293, author = {Current, M. and Hobler, Gerhard and Kawasaki, Y.}, title = {{A}spects of {H}ighly-channeled {M}e{V} {I}mplants of {D}opants in {S}i(100)}, booktitle = {19th {I}nternational {W}orkshop on {J}unction {T}echnology 2019}, year = {2019}, pages = {40--45}, url = {https://publik.tuwien.ac.at/files/publik_280293.pdf}, isbn = {978-4-86348-728-4}, keywords = {channeling, {M}e{V} dopant implants in {S}i, {M}onte-{C}arlo modeling}, note = {invited; talk: 19th {I}nternational {W}orkshop on {J}unction {T}echnology 2019, {K}yoto, {J}apan; 2019-06-06 -- 2019-06-07} }