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@inproceedings{TUW-280701,
    author = {Aguinsky, Luiz Felipe and Manstetten, Paul and H{\"o}ssinger, Andreas and Selberherr, Siegfried and Weinbub, Josef},
    title = {{A}n {E}xtended {K}nudsen {D}iffusion {M}odel for {A}spect {R}atio {D}ependent {A}tomic {L}ayer {E}tching},
    booktitle = {{A}bstracts of the {I}nternational {C}onference on {A}tomic {L}ayer {D}eposition ({A}{L}{D}) {F}eaturing the {I}nternational {W}orkshop on {A}tomic {L}ayer {E}tching ({A}{L}{E})},
    year = {2019},
    pages = {109},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2019/CP2019_Aguinsky_3.pdf},
    note = {talk: {I}nternational {W}orkshop on {A}tomic {L}ayer {E}tching ({A}{L}{E}), {B}ellevue, {W}{A}, {U}{S}{A}; 2019-07-21 -- 2019-07-24}
}