@article{TUW-281108, author = {Makarov, Alexander and Sverdlov, Viktor and Selberherr, Siegfried}, title = {{S}tructural {O}ptimization of {M}{T}{J}s with a {C}omposite {F}ree {L}ayer}, journal = {{P}roceedings of {S}{P}{I}{E}}, year = {2013}, volume = {8813}, pages = {88132Q-1--88132Q-9}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2013_Makarov_3.pdf}, doi = {10.1117/12.2025568}, note = {invited} }