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@article{TUW-281108,
    author = {Makarov, Alexander and Sverdlov, Viktor and Selberherr, Siegfried},
    title = {{S}tructural {O}ptimization of {M}{T}{J}s with a {C}omposite {F}ree {L}ayer},
    journal = {{P}roceedings of {S}{P}{I}{E}},
    year = {2013},
    volume = {8813},
    pages = {88132Q-1--88132Q-9},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2013_Makarov_3.pdf},
    doi = {10.1117/12.2025568},
    note = {invited}
}