@inproceedings{TUW-281117, author = {Toifl, Alexander and Quell, Michael and H{\"o}ssinger, Andreas and Babayan, Artem and Selberherr, Siegfried and Weinbub, Josef}, title = {{N}ovel {N}umerical {D}issipation {S}cheme for {L}evel-{S}et {B}ased {A}nisotropic {E}tching {S}imulations}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2019}, pages = {327--330}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2019/CP2019_Toifl_1.pdf}, isbn = {978-1-7281-0938-1}, doi = {10.1109/SISPAD.2019.8870443}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {U}dine, {I}taly; 2019-09-04 -- 2019-09-06} }